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Proceedings Paper

Control of cohesive-force ordering in organic-inorganic hybrid pillar arrays
Author(s): Hiroyo Segawa; Satoshi Yamaguchi; Tetsuji Yano; Shuichi Shibata
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Paper Abstract

Organic-Inorganic hybrid pillar arrays have been controlled by cohesive force during drying in photolithography. Two-dimensional periodic pillars with micrometer repetitions were fabricated from an organic-inorganic hybrid material. The pillars were gathered at the top and gtop-gatheringh pillar patterns were obtained depending on pillar sizes such as height of the pillars and distance between neighboring pillars and types of rinse liquids. The top-gathering pillar patterns could be obtained easily in the pillar arrays with same structural parameters using 1-PrOH as a rinse liquid rather than water. From in situ observation of the drying rinse liquids, it was found that the drying of 1-PrOH differs from that of water in the pillar arrays because of the difference in the contact angles. Top-gathering pillars were partially introduced in a homogeneous periodic pillar array by the different pillar formations between two types of rinse liquids.

Paper Details

Date Published: 20 December 2006
PDF: 9 pages
Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64151E (20 December 2006); doi: 10.1117/12.695798
Show Author Affiliations
Hiroyo Segawa, Tokyo Institute of Technology (Japan)
Satoshi Yamaguchi, Tokyo Institute of Technology (Japan)
Tetsuji Yano, Tokyo Institute of Technology (Japan)
Shuichi Shibata, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 6415:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David Victor Thiel, Editor(s)

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