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Proceedings Paper

Contouring of surfaces with discontinuities using ESPI
Author(s): A. W. Koch; A. Purde; M. Jakobi
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Paper Abstract

Electronic speckle pattern interferometry (ESPI) can provide accurate contour measurements in the micron range and short measurement times far below one second. Typical surfaces in industrial applications, however, often show discontinuities, like steps or holes. An unambiguous measurement of such surfaces is possible, if the synthetic wavelength is chosen larger than the largest surface step. A long synthetic wavelength, however, introduces a high noise level such that an unambiguous measurement combined with a high accuracy is not possible in any case. Our preferred solution for this problem is the combination of two or more synthetic wavelengths. In contrast to other publications (hierarchical, pixel-wise approach) our area-based approach uses only two synthetic wavelengths minimizing measurement time and device complexity. In this paper we present different methods for merging the phase images of the two synthetic wavelengths into one measurement result combining accuracy and unambiguousness.

Paper Details

Date Published: 15 September 2006
PDF: 6 pages
Proc. SPIE 6341, Speckle06: Speckles, From Grains to Flowers, 634126 (15 September 2006); doi: 10.1117/12.695491
Show Author Affiliations
A. W. Koch, Technische Univ. München (Germany)
A. Purde, Technische Univ. München (Germany)
M. Jakobi, Technische Univ. München (Germany)

Published in SPIE Proceedings Vol. 6341:
Speckle06: Speckles, From Grains to Flowers
Pierre Slangen; Christine Cerruti, Editor(s)

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