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Proceedings Paper

A new self-mixing interferometer for micro-displacement reconstruction
Author(s): Dongmei Guo; Ming Wang
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Paper Abstract

A new self-mixing interferometer based on sinusoidal phase-modulating technique for micro-displacement reconstruction is presented in this paper. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Fourier analysis method is proposed to demodulate the phase. The optimum values of the modulation frequency and modulation depth are discussed. Theoretical analysis and simulation results are given. Experimentally, the micro-movement of a high precision commercial PZT has been reconstructed, which can obtain a displacement measurement accuracy of a few nanometers.

Paper Details

Date Published: 15 September 2006
PDF: 5 pages
Proc. SPIE 6341, Speckle06: Speckles, From Grains to Flowers, 634123 (15 September 2006); doi: 10.1117/12.695486
Show Author Affiliations
Dongmei Guo, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 6341:
Speckle06: Speckles, From Grains to Flowers
Pierre Slangen; Christine Cerruti, Editor(s)

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