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Proceedings Paper

Laser plasmatron for CVD synthesis of diamond in open air
Author(s): V. G. Naumov; V. E. Cherkovetch; V. U. Dubrovckii; F. K. Kosyrev; V. G. Vostrikov; V. I. Konov; A. P. Bolshakov; V. G. Ral'chenko
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Paper Abstract

Laser plasma technique for CVD synthesis of diamond in open air that dos not demand a vacuum or reaction chamber has been developed. Laser plasmatron, based on 3 kW cw CO2 laser and presented in this work, was used for CVD of diamond films on tungsten and molybdenum substrates with deposition area of about 3 - 4 times larger then plasma jet cross-section. Different modes of laser plasmatron operation with substrate movement relative to plasma core are considered. Possible directions of further investigation of laser-induced plasma CVD of diamond on large area are discussed.

Paper Details

Date Published: 10 June 2006
PDF: 7 pages
Proc. SPIE 6344, Advanced Laser Technologies 2005, 63441N (10 June 2006); doi: 10.1117/12.694418
Show Author Affiliations
V. G. Naumov, Troitsk Institute for Innovation and Fusion Research (Russia)
V. E. Cherkovetch, Troitsk Institute for Innovation and Fusion Research (Russia)
V. U. Dubrovckii, Troitsk Institute for Innovation and Fusion Research (Russia)
F. K. Kosyrev, Troitsk Institute for Innovation and Fusion Research (Russia)
V. G. Vostrikov, Troitsk Institute for Innovation and Fusion Research (Russia)
V. I. Konov, General Physics Institute (Russia)
A. P. Bolshakov, General Physics Institute (Russia)
V. G. Ral'chenko, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 6344:
Advanced Laser Technologies 2005
Ivan A. Shcherbakov; Kexin Xu; Qingyue Wang; Alexander V. Priezzhev; Vladimir I. Pustovoy, Editor(s)

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