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Proceedings Paper

Recent trends in white-light interferometry
Author(s): Katsuichi Kitagawa
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Paper Abstract

The technique of surface profile measurement utilizing white-light interferometry is widely used in industry. However, it has certain shortcomings, such as slow measurement speed and the possibility of error caused by a transparent film on the surface. This paper introduces four of our recent developments in white-light interferometry: 1) speed improvement by sub-Nyquist sampling, 2) accuracy improvement through the use of phase information, 3) profiling of a thick transparent film, and 4) profiling of a thin transparent film.

Paper Details

Date Published: 12 October 2006
PDF: 10 pages
Proc. SPIE 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV, 638201 (12 October 2006); doi: 10.1117/12.693634
Show Author Affiliations
Katsuichi Kitagawa, Toray Engineering Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 6382:
Two- and Three-Dimensional Methods for Inspection and Metrology IV
Peisen S. Huang, Editor(s)

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