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Proceedings Paper

An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro-actuators
Author(s): Guchuan Zhu; Jean-François Chianetta; Mehran Hosseini; Yves-Alain Peter
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Paper Abstract

This paper extends the modeling of the effect of fringing field, proposed in our recent work, to more generic devices: electrostatic parallel-plate actuators with deformations. Though these devices can be model as two parallel capacitors with a variable factor depending on the displacement, it is difficult to determine the analytical expression of such a function. It is shown that, like the effect of fringing field, the modeling error of the effective actuator due to deformations can be compensated by introducing a variable serial capacitor. When a suitable robust control is used, the full knowledge of the introduced serial capacitor is not required, but merely its boundaries of variation. Based on this model, a robust control scheme is constructed using the theory of input-to-state stability (ISS) and backstepping state feedback design. This method allows loosening the stringent requirements on modeling accuracy without compromising the performance. The stability and the performance of the system using this control scheme are demonstrated through both stability analysis and numerical simulation.

Paper Details

Date Published: 12 October 2006
PDF: 11 pages
Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740V (12 October 2006); doi: 10.1117/12.692301
Show Author Affiliations
Guchuan Zhu, École Polytechnique de Montréal (Canada)
Jean-François Chianetta, École Polytechnique de Montréal (Canada)
Mehran Hosseini, École Polytechnique de Montréal (Canada)
Yves-Alain Peter, École Polytechnique de Montréal (Canada)

Published in SPIE Proceedings Vol. 6374:
Optomechatronic Actuators, Manipulation, and Systems Control
Farrokh Janabi-Sharifi; Yukitoshi Otani, Editor(s)

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