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Proceedings Paper

Determination of measurement uncertainty in the developed instantaneous phase shifting interferometer
Author(s): N. R. Sivakumar; B. Tan; K. Venkatakrishnan
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Paper Abstract

In this paper, detection of system noise in the optical layout for instantaneous phase shifting interferometry is discussed. Experiments were carried out on a diamond turned aluminum surface on the developed interferometer. The results were then compared with results from a commercial profiler to ascertain the uncertainty in the developed system. The uncertainties in the developed system were attributed to the larger measurement area, compared to that of the commercial profiler, and the use of nonstandard reference surface for measurement.

Paper Details

Date Published: 12 July 2006
PDF: 7 pages
Proc. SPIE 6342, International Optical Design Conference 2006, 63421W (12 July 2006); doi: 10.1117/12.692232
Show Author Affiliations
N. R. Sivakumar, Concordia Univ. (Canada)
B. Tan, Ryerson Univ. (Canada)
K. Venkatakrishnan, Ryerson Univ. (Canada)

Published in SPIE Proceedings Vol. 6342:
International Optical Design Conference 2006
G. Groot Gregory; Joseph M. Howard; R. John Koshel, Editor(s)

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