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Proceedings Paper

Aberration functions for microlithographic lens
Author(s): Tomoyuki Matsuyama; Tomoko Ujike
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Paper Abstract

We proposed a series of orthogonal aberration functions, which is suitable for a microlithographic projection lens. In this paper, general explanation and numbering of the orthogonal aberration functions are reviewed.

Paper Details

Date Published: 21 July 2006
PDF: 15 pages
Proc. SPIE 6342, International Optical Design Conference 2006, 63422D (21 July 2006); doi: 10.1117/12.692226
Show Author Affiliations
Tomoyuki Matsuyama, Nikon Corp. (Japan)
Tomoko Ujike, Nikon Corp. (Japan)

Published in SPIE Proceedings Vol. 6342:
International Optical Design Conference 2006
G. Groot Gregory; Joseph M. Howard; R. John Koshel, Editor(s)

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