Proceedings Paper
Aberration functions for microlithographic lens| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
We proposed a series of orthogonal aberration functions, which is suitable for a microlithographic projection lens. In this paper, general explanation and numbering of the orthogonal aberration functions are reviewed.
Paper Details
Date Published: 21 July 2006
PDF: 15 pages
Proc. SPIE 6342, International Optical Design Conference 2006, 63422D (21 July 2006); doi: 10.1117/12.692226
Published in SPIE Proceedings Vol. 6342:
International Optical Design Conference 2006
G. Groot Gregory; Joseph M. Howard; R. John Koshel, Editor(s)
PDF: 15 pages
Proc. SPIE 6342, International Optical Design Conference 2006, 63422D (21 July 2006); doi: 10.1117/12.692226
Show Author Affiliations
Tomoyuki Matsuyama, Nikon Corp. (Japan)
Tomoko Ujike, Nikon Corp. (Japan)
Published in SPIE Proceedings Vol. 6342:
International Optical Design Conference 2006
G. Groot Gregory; Joseph M. Howard; R. John Koshel, Editor(s)
© SPIE. Terms of Use
