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Proceedings Paper

Holographic nanolithography techniques for the fabrication of microcavity arrays
Author(s): Jeonghoi Kim; Changsu Kim; Haewook Han
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Paper Abstract

Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography technique. Using two laser beams with different angles incident on the sample, microcavities with 2D internal nanostructures are patterned with a few micrometer periods.

Paper Details

Date Published: 6 October 2006
PDF: 4 pages
Proc. SPIE 6352, Optoelectronic Materials and Devices, 63523T (6 October 2006); doi: 10.1117/12.691633
Show Author Affiliations
Jeonghoi Kim, Pohang Univ. of Science and Technology (South Korea)
Changsu Kim, LG-Philips LCD (South Korea)
Haewook Han, Pohang Univ. of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 6352:
Optoelectronic Materials and Devices
Yong Hee Lee; Fumio Koyama; Yi Luo, Editor(s)

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