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Proceedings Paper

Three-dimensional laser microfabrication
Author(s): Saulius Juodkazis; Hiroaki Misawa
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Paper Abstract

The mechanism of three-dimensional (3D) laser micro-structuring of dielectrics (resists, polymers, glasses, and crystals) by the direct laser writing is discussed. Overview of a light-matter interaction of a tightly-focused femtosecond pulse with dielectrics is presented. The void formation is demonstrated inside silica glass by a single picosecond pulse. Peculiarities of tight focusing and an axial superposition of two co-propagating pulses at the focus are revealed by numerical simulations. Potential of the fabricated 3D patterns in micro-photonics, micro-fluidics, and sensor applications is discussed.

Paper Details

Date Published: 29 September 2006
PDF: 8 pages
Proc. SPIE 6400, Femtosecond Phenomena and Nonlinear Optics III, 640005 (29 September 2006); doi: 10.1117/12.689384
Show Author Affiliations
Saulius Juodkazis, Hokkaido Univ. (Japan)
Hiroaki Misawa, Hokkaido Univ. (Japan)

Published in SPIE Proceedings Vol. 6400:
Femtosecond Phenomena and Nonlinear Optics III
Sean M. Kirkpatrick; Razvan Stoian, Editor(s)

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