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Proceedings Paper

Femtosecond laser micromachining: applications in photonic device fabrication and laser joining
Author(s): Wataru Watanabe; Junji Nishii; Kazuyoshi Itoh
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Paper Abstract

When femtosecond laser pulses are tightly focused into a transparent material, the intensity in the focal volume is high enough to induce permanent structural modifications. Using these permanent structural modifications, one can micromachine structures inside the bulk of a transparent material in three-dimensions. I present the fabrication of photonic devices in transparent materials, including waveguides, couplers, diffractive lenses, and microfluidic channels in silica glass and PMMA. Applications of femtosecond laser micromachining include the joining of glass substrates by localized melting and resolidification.

Paper Details

Date Published: 29 September 2006
PDF: 9 pages
Proc. SPIE 6400, Femtosecond Phenomena and Nonlinear Optics III, 640003 (29 September 2006); doi: 10.1117/12.689321
Show Author Affiliations
Wataru Watanabe, National Institute of Advanced Industrial Science and Technology (Japan)
Junji Nishii, National Institute of Advanced Industrial Science and Technology (Japan)
Kazuyoshi Itoh, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 6400:
Femtosecond Phenomena and Nonlinear Optics III
Sean M. Kirkpatrick; Razvan Stoian, Editor(s)

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