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Proceedings Paper

Modelling and performance evaluation of a novel optical accelerometer
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Paper Abstract

Accelerometers are one of the important sensors for a number of applications. In this paper, an accelerometer utilizing optical means for sensing the acceleration is introduced. The proposed accelerometer combines micro optical, electrical and mechanical means (MOEMS) to achieve high sensitivity, wide measurable range, as well as minimal losses in optical part. The optical subsystem is a highly integrated system where passive and active components are all monolithically integrated together. Photo-elastic effect and electro-optical modulation are used when sensing and processing the acceleration. The simulation models of the parts of optical subsystem and its parts and the results are also analyzed.

Paper Details

Date Published: 6 October 2006
PDF: 9 pages
Proc. SPIE 6352, Optoelectronic Materials and Devices, 63522O (6 October 2006); doi: 10.1117/12.688179
Show Author Affiliations
F. Chen, Auckland Univ. (New Zealand)
Z. Salcic, Auckland Univ. (New Zealand)
J. H. Wang, Tianjin Polytechnic Univ. (China)

Published in SPIE Proceedings Vol. 6352:
Optoelectronic Materials and Devices
Yong Hee Lee; Fumio Koyama; Yi Luo, Editor(s)

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