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Proceedings Paper

Reticle carrier material as ESD protection
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Paper Abstract

This report addresses the question of material conductivity (electrically isolating/dissipative/conductive) of reticle carrier and the reticle contact points in reticle carriers and its effect in protecting the reticle from field induced electrostatic discharge damage (ESD). Materials with different electrical properties were investigated; tests included measurements of surface resistivity, resistance to ground, charging, field induced and shielding efficiency. The impact of different materials on protecting reticles from ESD is also studied in an experimental setup using ESD sensitive CANARYTM reticles. A recommendation of ESD protection through material choice and its electrical properties is given.

Paper Details

Date Published: 20 October 2006
PDF: 9 pages
Proc. SPIE 6349, Photomask Technology 2006, 634952 (20 October 2006); doi: 10.1117/12.685926
Show Author Affiliations
Dirk Helmholz, Advanced Mask Technology Ctr. GmbH & Co. (Germany)
Michael Lering, Advanced Mask Technology Ctr. GmbH & Co. (Germany)

Published in SPIE Proceedings Vol. 6349:
Photomask Technology 2006
Patrick M. Martin; Robert J. Naber, Editor(s)

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