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Proceedings Paper

Laser direct writing of inorganic-organic hybrid polymeric channel waveguide for optical integrated circuits
Author(s): Shuping Wang; Brad Borden; Ye Li; Prakhar Goel
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Paper Abstract

A focused 375 nm laser diode module is used to fabricate optical channel waveguides on Si wafers using commercially available inorganic-organic hybrid polymers. The fabrication process eliminates all the complex steps associated with the definition of structures using photolithographic techniques, making rapid prototyping of integrated optic devices possible. Channel waveguides with smooth side-walls are fabricated and characterized. The losses, measured using cutback loss measurement method, are typically less than 1dB/cm, making them especially applicable to Si based optical interconnects applications.

Paper Details

Date Published: 2 October 2006
PDF: 7 pages
Proc. SPIE 6389, Active and Passive Optical Components for Communications VI, 63890B (2 October 2006); doi: 10.1117/12.685279
Show Author Affiliations
Shuping Wang, Univ. of North Texas (United States)
Brad Borden, Univ. of North Texas (United States)
Ye Li, D4D Technologies L.P. (United States)
Prakhar Goel, Univ. of North Texas (United States)

Published in SPIE Proceedings Vol. 6389:
Active and Passive Optical Components for Communications VI
Achyut K. Dutta; Yasutake Ohishi; Niloy K. Dutta; Jesper Moerk, Editor(s)

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