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Proceedings Paper

Near-field induced polarization imaging for optical data storage metrology
Author(s): Tao Chen; Tom D. Milster
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Paper Abstract

Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ±2nm for obtaining height information.

Paper Details

Date Published: 22 June 2006
PDF: 8 pages
Proc. SPIE 6282, Optical Data Storage 2006, 62820D (22 June 2006); doi: 10.1117/12.685172
Show Author Affiliations
Tao Chen, College of Optical Sciences, Univ. of Arizona (United States)
Tom D. Milster, College of Optical Sciences, Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 6282:
Optical Data Storage 2006
Ryuichi Katayama; Tuviah E. Schlesinger, Editor(s)

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