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Proceedings Paper

A simple lithographic method for fabricating micro/nano multiscale structures
Author(s): Hoon Eui Jeong; Sung Hoon Lee; Pilnam Kim; Jae Kwan Kim; Kahp Y. Suh
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Paper Abstract

A simple method for fabricating micro/nanoscale hierarchical structures is presented using a two-step temperature-directed capillary molding technique. This lithographic method involves a sequential application of molding process in which a uniform polymer-coated surface is molded with a patterned mold by means of capillary force above the glass transition temperature of the polymer. Various microstructures and nanostructures were fabricated with minimum resolution down to ~ 50 nm with good reproducibility. Also contact angle measurements of water indicated that two wetting states coexist on a multiscale hierarchical structure where heterogeneous wetting is dominant for microstructure and homogeneous wetting for nanostructure. A simple theoretical model combining these two wetting states was presented, which was in good agreement with the experimental data. Using this approach, multiscale hierarchical structures for biomimetic functional surfaces can be fabricated with precise control over geometrical parameters and the wettability of a solid surface can be tailored in a controllable manner.

Paper Details

Date Published: 24 March 2006
PDF: 9 pages
Proc. SPIE 6151, Emerging Lithographic Technologies X, 61512P (24 March 2006); doi: 10.1117/12.682146
Show Author Affiliations
Hoon Eui Jeong, Seoul National Univ. (South Korea)
Sung Hoon Lee, Seoul National Univ. (South Korea)
Pilnam Kim, Seoul National Univ. (South Korea)
Jae Kwan Kim, Seoul National Univ. (South Korea)
Kahp Y. Suh, Seoul National Univ. (South Korea)

Published in SPIE Proceedings Vol. 6151:
Emerging Lithographic Technologies X
Michael J. Lercel, Editor(s)

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