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Proceedings Paper

Interferometric testing through transmissive media (TTM)
Author(s): Sen Han
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Paper Abstract

The TTM objective module was designed to allow interferometric measurement of objects underneath transmissive materials at higher magnifications. For proper functioning, many factors must be optimized, including dispersive compensation, coherence effects, thickness variation insensitivity, and illumination. Measurement results will be presented for through glass, through fluid and dynamic MEMS application examples.

Paper Details

Date Published: 14 August 2006
PDF: 5 pages
Proc. SPIE 6293, Interferometry XIII: Applications, 629305 (14 August 2006); doi: 10.1117/12.682089
Show Author Affiliations
Sen Han, Veeco Metrology Inc. (United States)

Published in SPIE Proceedings Vol. 6293:
Interferometry XIII: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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