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Proceedings Paper

Simultaneous measurement of deformation and thickness change in polymer films
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Paper Abstract

We present experimental results in deformation measurement and thickness change in polymer films employing Fourier domain interferometry. The set-up is a Michelson configuration in which interference signal betweeen light reflected from a reference arm is superposed with two reflection from the first and second interface from the film sample. Distance measurements for determination of deformation and thickness values were obtained after an inverse Fourier transform of the spectrum signal. With this configuration, measurements with 1 micron axial resolution, and 2mm dynamic range were obtained.

Paper Details

Date Published: 14 August 2006
PDF: 8 pages
Proc. SPIE 6293, Interferometry XIII: Applications, 62930R (14 August 2006); doi: 10.1117/12.680546
Show Author Affiliations
Eneas N. Morel, Univ. Tecnológica Nacional (Argentina)
Jorge R. Torga, Univ. Tecnológica Nacional (Argentina)

Published in SPIE Proceedings Vol. 6293:
Interferometry XIII: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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