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Proceedings Paper

Fast surface profiling using monochromatic phase and fringe order in white-light interferometry
Author(s): Chi-Hong Tung; Chiung-Huei Huang; Ching-Fen Kao; Calvin C. Chang
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Paper Abstract

The results of combining the wrapped phase with the fringe order of this phase to increase the precision of white-light interferometry at high scanning speed are presented. Monochromatic phase data are calculated using the Fourier method and the fringe order is determined using a general coherence peak sensing method. A wide scanning interval of 5λ/8 and a narrow-band color filter with a bandwidth of 70 nm are adopted to acquire interferograms. Experiments with an rms repeatability of step height measurement of below 1 nm and a scanning speed of 40 μm/s are performed.

Paper Details

Date Published: 14 August 2006
PDF: 9 pages
Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62921F (14 August 2006); doi: 10.1117/12.678899
Show Author Affiliations
Chi-Hong Tung, Industrial Technology Research Institute (Taiwan)
Chiung-Huei Huang, Industrial Technology Research Institute (Taiwan)
Ching-Fen Kao, Industrial Technology Research Institute (Taiwan)
Calvin C. Chang, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 6292:
Interferometry XIII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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