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Proceedings Paper

Digital realization of precision surface defect evaluation system
Author(s): Fengquan Wang; Yongying Yang; Dandan Sun; Liming Yang; Ruijie Li
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Paper Abstract

The automatic inspection of surface imperfections of precise elements is a durable problem expected to be solved. These goals require the use of objective methods to automatic inspection of surface imperfections. Based on the defects image which are light in dark background in scattering imaging system, a complete digital evaluation system of surface imperfections, is presented in this paper. Using the XY- scanning system to detect sub-aperture, digital image could be stitched based on isometric serial images. Implementing binary image segmentation and marginal test, feature extraction by using erosion and dilation algorithm was studied. In this system, the lateral resolution is approximately 1μm. The results provide theoretical and practical evidence to establish the precise surface imperfections evaluation system.

Paper Details

Date Published: 19 May 2006
PDF: 5 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500F (19 May 2006); doi: 10.1117/12.677979
Show Author Affiliations
Fengquan Wang, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Dandan Sun, Zhejiang Univ. (China)
Liming Yang, Fine Optical Engineering Research Ctr. (China)
Ruijie Li, Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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