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Proceedings Paper

Automated optical function testing of diffractive beam shapers
Author(s): Todd E. Lizotte; Orest P. Ohar
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Paper Abstract

Function testing of diffractive optics is a straight forward procedure when dealing with single elements or discrete systems of optics on an optical bread board. As the volumes of a particular diffractive optical device increase to production levels approaching hundreds to thousands of optics, the testing task can quickly become arduous and mind-numbing. At this level of production, data collection and quality monitoring is required to close the feedback loop to the manufacturing process. In this paper, a description of a prototype semi-automated diffractive optics testing platform used to measure performance, map quality and confirm working distances of a two element diffractive beam shaper system will be given. The testing system architecture and operation will be outlined and each subsystem will be described including software. A wafer map, consisting of data from an array of beam shapers, representing performance and etch depth from each diffractive optic within the wafer will be presented. An example of how data is compiled from a tested wafer and then interlaced with external sources of topographic data for ease of analysis and interrogation will be explained. Methods for beam analysis will be disclosed including multiple profilometer techniques. Further information will be shown on how the data from the system can be interpreted to identify defects on specific optics, manufacturing defects and non-linearity effects due to grayscale lithography and etch processes.

Paper Details

Date Published: 9 September 2006
PDF: 7 pages
Proc. SPIE 6290, Laser Beam Shaping VII, 62900C (9 September 2006);
Show Author Affiliations
Todd E. Lizotte, Hitachi Via Mechanics USA Inc. (United States)
Orest P. Ohar, Hitachi Via Mechanics USA Inc. (United States)

Published in SPIE Proceedings Vol. 6290:
Laser Beam Shaping VII
Fred M. Dickey; David L. Shealy, Editor(s)

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