Share Email Print
cover

Proceedings Paper

Non-contacting measurement system design of ultra-precision aspheric surface
Author(s): Jianchun Liu; Yinbiao Guo; Jing Huang; Gujin Liu
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Aiming at various influential factors during the ultra-precision aspheric surface testing, this paper introduces an aspheric measurement technique based on the high accuracy and non-contacting measuring equipment of laser. To form the platform of four-dimension control system, the measuring instrument of laser is used to realize on-line testing process error of aspheric mirror, and the results of measurement provide error data for compensation processing. To build testing and controlling mathematical model and to design the measurement of ultra-precision aspheric workpiece, the method of compensation based on analyzing the reason of non-contacting error comes into being and the finest way of processing data is given. With full automatic measuring and data processing of the system, error analyzing, displaying could be realized, and data could be provided for compensation processing to processing system.

Paper Details

Date Published: 23 February 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502Q (23 February 2006); doi: 10.1117/12.676942
Show Author Affiliations
Jianchun Liu, Xiamen Univ. (China)
Xiamen Univ. of Technology (China)
Yinbiao Guo, Xiamen Univ. (China)
Jing Huang, Xiamen Univ. of Technology (China)
Gujin Liu, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

© SPIE. Terms of Use
Back to Top