3-D information becomes more and more important in engineering field. With the advent of miniaturization and the emergence of micromechanics, microdynamics and nanotechnology, 3-D measurement was introduced in confocal technology in recently years because of its high precision, non-contact, and wide field. This paper describes the principle, the characteristics of confocal microscopy. Main conclusions based on Fourier coherent theory are given. According to the conclusions, some key parameters can be selected. In addition, some actual case should be concerned. The paper also gives the practical set-up in the experiment which is designed for surface topography. Experiment results obtained for different conditions are also presented.

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615018 (19 May 2006); doi: 10.1117/12.676754

Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)