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Proceedings Paper

Image processing for pattern diffracted by phase plate
Author(s): Shuiyuan Tang; Zhi Li; Qun Hao
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Paper Abstract

Optical measurement systems and instruments with diffractive optics have been successfully applied in various fields, particularly for the tasks, such as measuring geometries of large-scale workpieces, profiling large aspheres used in synchrotron radiation facility, etc. In this paper efforts to further improve the measurement resolution and accuracy of these optical measuring techniques are presented, in which principles of the optical systems employing typical diffractive optics as π-jump phase plate are, in detail, described, and characteristics of the image patterns created within these systems are analyzed. Finally a novel diffraction pattern processing method based on multi-layer feedforward neural networks is proposed, which is proved by digital simulation to be better than the conventional method based on the Least-squares curve fitting. Preliminary experimental setups have been built up to verify the feasibility and effectiveness of this novel method, and the results coincide with simulation very well.

Paper Details

Date Published: 23 February 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61503Z (23 February 2006); doi: 10.1117/12.676516
Show Author Affiliations
Shuiyuan Tang, Beijing Institute of Technology (China)
Zhi Li, Beijing Institute of Technology (China)
Qun Hao, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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