An optical system is designed to get projection of the transmission grating, the deformed grating is obtained on surface of the object. The image of the deformed grating is given by the lens, the reference grating is put on the place of the image, and then the moire fringe is obtained. The amplify principle of the moire fringe is used to measure the profile of the object. The optical principle of the projection is analyzed. And the relation between the phase and the height of object is deduced. From the different point of geometry optics and the physics opticsl, the optical system is analyzed, the factors that influence the image equality and the measuring result are obtained. So the betterment of improving the measuring precision is brought forward, and in the later information processing, because of the diffuse reflection, the image equality is not very well. In order to get a good image, the digital filter is used to filter the noise and smooth the image firstly. Then in order to improve the measure precision, the subdivision technology is applied. The Fourier transform profilometry and phase shifting technology is used in the calculation. A detail analyses is done both in time field and frequency field. And the method of improving the measuring precision is put forward. A good digital filter algorithm is brought forward in the Fourier transform profilometry. In the phase shifting technology, the detail formula of three-step and four-step is given. At last the phase that is relational with the high information of the object is get, but the phase is disconnected phase, after the unwrapping algorithm,the disconnected phase is changed to be the continuous phase. Taking use of the relation between the phase and height, the height is obtained. Then the three-dimensional profile of the measured object can be reconstructed. The system is very convenient for non-contact measure of profile of some objects.

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615021 (19 May 2006); doi: 10.1117/12.676420

Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)