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Proceedings Paper

Experiment and modeling of tilted mirror MEMS variable optical attenuator
Author(s): Chun He
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Paper Abstract

We developed model and unveiled the mechanism of the large wavelength-dependent attenuation (WDA) that has been hindering the development of tilting-mirror MEMS VOA. We developed a new tilting-mirror VOA with low WDA of <0.1dB at 20dB attenuation.

Paper Details

Date Published: 3 March 2006
PDF: 4 pages
Proc. SPIE 6124, Optoelectronic Integrated Circuits VIII, 61240H (3 March 2006); doi: 10.1117/12.674117
Show Author Affiliations
Chun He, AFOP, Inc. (United States)

Published in SPIE Proceedings Vol. 6124:
Optoelectronic Integrated Circuits VIII
Louay A. Eldada; El-Hang Lee, Editor(s)

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