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Proceedings Paper

Multi-modal miniaturized microscope: successful merger of optical, MEMS, and electronic technologies
Author(s): Tomasz S. Tkaczyk; Jeremy D. Rogers; Mohammed Rahman; Todd C. Christenson; Stephen Gaalema; Eustace L. Dereniak; Rebecca Richards-Kortum; Michael R. Descour
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Paper Abstract

The multi-modal miniature microscope (4M) device for early cancer detection is based on micro-optical table (MOT) platform which accommodates on a chip: optical, micro-mechanical, and electronic components. The MOT is a zeroalignment optical-system concept developed for a wide variety of opto-mechanical instruments. In practical terms this concept translates into assembly errors that are smaller than the tolerances on the performance of the optical system. This paper discusses all major system elements: optical system, custom high speed CMOS detector and comb drive actuator. It also points to mutual relations between different technologies. The hybrid sol-gel lenses, their fabrication and assembling techniques, optical system parameters, and various operation modes are also discussed. A particularly interesting mode is a structured illumination technique that delivers confocal-imaging capabilities and may be used for optical sectioning. Structured illumination is produced with LIGA fabricated actuator scanning in resonance and reconstructed using sine approximation algorithm.

Paper Details

Date Published: 9 December 2005
PDF: 8 pages
Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 605016 (9 December 2005); doi: 10.1117/12.668275
Show Author Affiliations
Tomasz S. Tkaczyk, College of Optical Sciences, Univ. of Arizona (United States)
Jeremy D. Rogers, College of Optical Sciences, Univ. of Arizona (United States)
Mohammed Rahman, Univ. of Texas (United States)
Todd C. Christenson, HT Micro (United States)
Stephen Gaalema, Black Forest Engineering (United States)
Eustace L. Dereniak, College of Optical Sciences, Univ. of Arizona (United States)
Rebecca Richards-Kortum, Univ. of Texas (United States)
Michael R. Descour, College of Optical Sciences, Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 6050:
Optomechatronic Micro/Nano Devices and Components
Yoshitada Katagiri, Editor(s)

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