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Proceedings Paper

Wave-front reconstruction for lateral shearing interferometers with big shear
Author(s): Peiying Liang; Jianping Ding; Jin Zhou; Hui-tian Wang
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Paper Abstract

A novel algorithm is proposed to reconstruct two-dimensional wave-front from differential wave-fronts measured in shearing interferometer. Two 1-dimensional estimates of object wave-front are computed using Fourier transform from differential wave-fronts, and then the 2-dimensional wave-front distribution is derived by use of least-square fitting. The algorithm is applicable to cases in which the shear amount is larger than one sampling interval, and thus alleviates the limitation on the shear amount imposed by conventional algorithms. Investigations into reconstruction accuracy and reliability are carried out by computer simulation. Optical experiments are made in a lateral shearing interferometer based on double-grating, and 3-dimensional surface profile of optical element under test are measured and presented. The analysis and discussion are also given in the final part of this article.

Paper Details

Date Published: 20 January 2006
PDF: 8 pages
Proc. SPIE 6027, ICO20: Optical Information Processing, 60270Q (20 January 2006); doi: 10.1117/12.667908
Show Author Affiliations
Peiying Liang, Nanjing Univ. (China)
Jianping Ding, Nanjing Univ. (China)
Jin Zhou, Nanjing Univ. (China)
Hui-tian Wang, Nanjing Univ. (China)

Published in SPIE Proceedings Vol. 6027:
ICO20: Optical Information Processing
Yunlong Sheng; Songlin Zhuang; Yimo Zhang, Editor(s)

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