Vacuum packaging is very important for some micro-electro-mechanical systems (MEMS) devices to perform their basic functions properly and to enhance their reliability by keeping these devices away from harmful external environment. In order to maintain high vacuum in a cavity of MEMS devices, residual gases and leaking gases must be eliminated by getter materials embedded. This paper will report the fabrication and characterization of advanced getter, or micro/nano getters for MEMS applications.

Date Published: 7 February 2006
PDF: 5 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320B (7 February 2006); doi: 10.1117/12.667858

Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS
Masayoshi Esashi; Zhaoying Zhou, Editor(s)