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Proceedings Paper

Photonic micro and sub-micro structures in LiNbO3 crystals
Author(s): Pengfei Wang; G.G. Bentini; M. Bianconi; A. Cerutti; M. Chiarini; P. Mazzoldi; G. Pennestri; C. Sada; Lin She
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Paper Abstract

High energy lasers processing of materials is knowing an increasing interest since it not only can make manufacturing faster, cleaner, and more accurate but also because it opens up entirely new technologies and manufacturing methods, that are simply not available by using standard techniques. In this paper, an experimental set-up, based on pulsed KrF excimer Laser, assembled for surface patterning of mono and two-dimensional, (1D-2D), micro and submicro structures on LiNbO3(LN) crystal, will be described in detail. The apparatus has been used to produce photonic structures in LN, both by patterning of PMMA photoresist, and by direct surface patterning through laser ablation or direct laser writing. The structures and properties of the photonic crystals fabricated by using this apparatus have been investigated, and the preliminary results will be presented.

Paper Details

Date Published: 3 February 2006
PDF: 6 pages
Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60291J (3 February 2006); doi: 10.1117/12.667765
Show Author Affiliations
Pengfei Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
G.G. Bentini, Istituto Microelettronica e Microsistemi, CNR (Italy)
M. Bianconi, Istituto Microelettronica e Microsistemi, CNR (Italy)
A. Cerutti, Istituto Microelettronica e Microsistemi, CNR (Italy)
M. Chiarini, Carlo Gavazzi Space SpA (Italy)
P. Mazzoldi, INFM Sez. di Padova (Italy)
G. Pennestri, Carlo Gavazzi Space SpA (Italy)
C. Sada, INFM Sez. di Padova (Italy)
Lin She, Carlo Gavazzi Space SpA (Italy)

Published in SPIE Proceedings Vol. 6029:
ICO20: Materials and Nanostructures
Wei Lu; Jeff Young, Editor(s)

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