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Proceedings Paper

Large-area diamond-like carbon films prepared by pulsed vacuum arc deposition on silicon lens
Author(s): Hai-feng Liang; Yi-xin Yan; Qian Mi; Jun-qi Xu; Chang-long Cai
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Paper Abstract

Diamond-like carbon, as anti-reflective and protective films, are prepared on silicon lens with φ150mm diameter. The measurement results show that uniformity error is less than 3% at range of φ150mm, the peak transmittance value is near to theory value, the films have excellent wear-resistance. Films' surface roughness is less than 10 nanometer from the atomic force microscopy image.

Paper Details

Date Published: 23 January 2006
PDF: 7 pages
Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290J (23 January 2006); doi: 10.1117/12.667687
Show Author Affiliations
Hai-feng Liang, Xi’an Institute of Technology (China)
Yi-xin Yan, Xi’an Institute of Technology (China)
Qian Mi, Xi’an Institute of Technology (China)
Jun-qi Xu, Xi’an Institute of Technology (China)
Chang-long Cai, Xi’an Institute of Technology (China)

Published in SPIE Proceedings Vol. 6029:
ICO20: Materials and Nanostructures
Wei Lu; Jeff Young, Editor(s)

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