Proceedings Paper
A low loss planar waveguide by using organic-inorganic Sol-Gel| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate(Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized, and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib waveguide was formed by inductively coupled plasma (ICP). A relation between refractive index and composition of the precursors was obtained by M-line method; the optical loss of the planar waveguide was measured to be 0.23dB/cm at 632.8nm wavelength. A directional coupler was also realized.
Paper Details
Date Published: 28 January 2006
PDF: 5 pages
Proc. SPIE 6025, ICO20: Optical Communication, 60251O (28 January 2006); doi: 10.1117/12.667073
Published in SPIE Proceedings Vol. 6025:
ICO20: Optical Communication
Yun-Chur Chung; Shizhong Xie, Editor(s)
PDF: 5 pages
Proc. SPIE 6025, ICO20: Optical Communication, 60251O (28 January 2006); doi: 10.1117/12.667073
Show Author Affiliations
Fu-Fei Pang, Shanghai Institute of Optics and Fine Mechanics (China)
Xui-You Han, Shanghai Institute of Optics and Fine Mechanics (China)
Hai-Wen Cai, Shanghai Institute of Optics and Fine Mechanics (China)
Xui-You Han, Shanghai Institute of Optics and Fine Mechanics (China)
Hai-Wen Cai, Shanghai Institute of Optics and Fine Mechanics (China)
Rong-Hui Qu, Shanghai Institute of Optics and Fine Mechanics (China)
Zu-Jie Fang, Shanghai Institute of Optics and Fine Mechanics (China)
Zu-Jie Fang, Shanghai Institute of Optics and Fine Mechanics (China)
Published in SPIE Proceedings Vol. 6025:
ICO20: Optical Communication
Yun-Chur Chung; Shizhong Xie, Editor(s)
© SPIE. Terms of Use
