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Proceedings Paper

On-line calibration of phase-shifter in phase-shifting interferometer
Author(s): Lei Chen; Yingchun Li; Fei Liu
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Paper Abstract

Phase-shifting interferometry (PSI) as a high accuracy measurement method is widely used in modern measurements. Accurate calibration of phase-shifter is very important if good measurement results are expected from PSI. A new method of on-line calibration for phase-shifter is presented. By constructing a mathematic model for intensity of interferogram associating with the phase-shifter's characters, the coefficients of the function can be solved by introducing Damped-Least-Square methods. Results of computer simulation show a high accuracy after several fast iterations. Experimental results are presented for on-line phase-shift calibration.

Paper Details

Date Published: 9 December 2005
PDF: 6 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 602412 (9 December 2005);
Show Author Affiliations
Lei Chen, Nanjing Univ. of Science and Technology (China)
Yingchun Li, Nanjing Univ. of Science and Technology (China)
Fei Liu, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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