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Proceedings Paper

Advances in interferometric surface measurement
Author(s): James C. Wyant
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Paper Abstract

The addition of electronics, computers, and software to interferometry has provided tremendous improvements in the measurement of surface shape and roughness. This talk will describe three such improvements; use of computer generated holograms for testing aspheric surfaces, techniques for performing interferometric measurements more accurate than the reference surface, and two single-shot phase-shifting interferometric techniques for reducing the sensitivity of an optical test to vibration and measuring dynamically changing surface shapes.

Paper Details

Date Published: 9 December 2005
PDF: 11 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 602401 (9 December 2005); doi: 10.1117/12.666802
Show Author Affiliations
James C. Wyant, College of Optical Sciences/Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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