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Proceedings Paper

Multilayer Fabry-Perot microbolometers for infrared wavelength selective detection
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Paper Abstract

Multi-color narrow-band Salisbury Screen and Jaumann Absorbers using optimized thickness Si3N4 layers are designed that produce wavelength selectivity in 7~14μm wavelength band. The Jaumann Absorbers can be used as a vertically stacked pixel structure to save space and enhance resolution compared to frequency selective Salisbury Screens pixels lying in a common plane.

Paper Details

Date Published: 17 May 2006
PDF: 7 pages
Proc. SPIE 6206, Infrared Technology and Applications XXXII, 62061G (17 May 2006); doi: 10.1117/12.666156
Show Author Affiliations
Sangwook Han, The Univ. of Texas at Austin (United States)
Joo-Yun Jung, The Univ. of Texas at Austin (United States)
Dean P. Neikirk, The Univ. of Texas at Austin (United States)

Published in SPIE Proceedings Vol. 6206:
Infrared Technology and Applications XXXII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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