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Proceedings Paper

Optical probing of nano-electromechanical systems (NEMS)
Author(s): K. L. Ekinci; D. Karabacak; T. Kouh; D. H. Kim
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Paper Abstract

Optical techniques are finding more and more use in the domain of nanoelectromechanical systems (NEMS). In particular, Michelson interferometry and Fabry-Perot interferometry have been employed to transduce high frequency motion of NEMS resonators. Here, we review our recent accomplishments in optical probing of NEMS. We discuss the effectiveness of the above-mentioned optical techniques as the relevant NEMS dimensions are reduced beyond the optical probing wavelength.

Paper Details

Date Published: 21 April 2006
PDF: 8 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860M (21 April 2006); doi: 10.1117/12.665299
Show Author Affiliations
K. L. Ekinci, Boston Univ. (United States)
D. Karabacak, Boston Univ. (United States)
T. Kouh, Kookmin Univ. (South Korea)
D. H. Kim, Seoul National Univ. of Technology (South Korea)

Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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