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Proceedings Paper

Silicon MOEMS-based IR sensors for the high-volume security market
Author(s): Kevin C. Liddiard
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Paper Abstract

In a previous paper presented to this SPIE forum a new technology was described which specifically addresses the high volume IR security sensor market. In the present paper, results are presented of recent research on silicon MOEMS-based resistance microbolometer technology directed towards high volume sensor manufacture. The dissertation includes the results of measurements made with an experimental sensor aimed at confirming performance predictions, including two mosaic-pixel FPA formats designed for multi-role applications. The conclusions support development of a silicon foundry compatible FPA technology using alloys of silicon as the temperature sensitive component, simple FPA packaging, and sensors units employing plastic optics and body components.

Paper Details

Date Published: 17 May 2006
PDF: 7 pages
Proc. SPIE 6206, Infrared Technology and Applications XXXII, 62061M (17 May 2006); doi: 10.1117/12.665209
Show Author Affiliations
Kevin C. Liddiard, Electro-optic Sensor Design (Australia)

Published in SPIE Proceedings Vol. 6206:
Infrared Technology and Applications XXXII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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