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Proceedings Paper

Ultra compact optical link made in amorphous silicon waveguide
Author(s): R. Orobtchouk; S. Jeannot; B. Han; T. Benyattou; J. M. Fedeli; P. Mur
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Paper Abstract

This paper reports about the design, fabrication and experimental passive compact building blocks (μbend of 2 μm radius, Y junction and Multi Mode Interference (MMI) splitter of 2 μm wide and 4.2 μm long) in a amorphous hydrogenated silicon (a-Si:H) based strip waveguide. The cross section of the waveguide is about 0.5 μm wide and 0.2 μm high.

Paper Details

Date Published: 20 April 2006
PDF: 10 pages
Proc. SPIE 6183, Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits, 618304 (20 April 2006);
Show Author Affiliations
R. Orobtchouk, Institut National des Sciences Appliquées de Lyon (France)
S. Jeannot, STMicroelectronics (France)
B. Han, Institut National des Sciences Appliquées de Lyon (France)
T. Benyattou, Institut National des Sciences Appliquées de Lyon (France)
J. M. Fedeli, CEA/LETI (France)
P. Mur, CEA/LETI (France)


Published in SPIE Proceedings Vol. 6183:
Integrated Optics, Silicon Photonics, and Photonic Integrated Circuits
Giancarlo C. Righini, Editor(s)

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