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Proceedings Paper

Digital in-line holography for dynamic micrometrology
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Paper Abstract

In this paper in-line digital holography has been explored for dynamic micro metrological applications. In in-line digital holography, full CCD sensor area is utilized for real image reconstruction of the objects with less speckle noise. Numerical evaluation of the amplitude and phase information during reconstruction process finds promising applications in optical micro-metrology. Vibration analysis of the smaller object has been performed by combining the time average principle with in-line digital holographic methods. A double exposure method has been explored for measurements, which is simultaneously used to suppress the overlapping of zero-order and twin image wave with real image wave. The vibration amplitude and mean static state deformation of the harmonically excited object are analysed separately from time average in-line digital holograms. The experimental results are presented for a thin aluminium membrane of 5mm diameter.

Paper Details

Date Published: 27 April 2006
PDF: 9 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618803 (27 April 2006); doi: 10.1117/12.664812
Show Author Affiliations
Vijay Raj Singh, Nanyang Technological Univ. (Singapore)
Gopalkrishna Hedge, Ngee Ann Polytechnic (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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