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Proceedings Paper

Research on terminal behavior of electrostatically actuated micropump membrane based on modal analysis
Author(s): Xiezhao Lin; - Jiying; Zichen Chen
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Paper Abstract

For optimizing the performance of the electrostatically actuated micropump, a multi-terminal behavior model of a micropump membrane is constructed by a modal projection technique. The dynamic state of the membrane is represented by a weighted combination of a few eigenmodes, which was obtained by using commercial finite element analysis programs ANSYSTM. By the data extraction technology, the capacitance of electrostatic excitation and membrane strain energy can be represented in modal coordinates. For considering the fluidic damping impact on the mode natural frequency and mode shape, the pump flow was treated as an additional mass attaching to the membrane. The pumping flow rate can be calculated by integrating the deformation profile function over the membrane's area. As a result, the terminal behavior model of membrane can be formulated in a set of ordinary differential algebraic equations, which is suitable for system level simulation. Finally, the dynamic behavior of a membrane was investigated.

Paper Details

Date Published: 21 March 2006
PDF: 6 pages
Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 60400U (21 March 2006); doi: 10.1117/12.664174
Show Author Affiliations
Xiezhao Lin, Zhejiang Univ. (China)
- Jiying, Zhejiang Univ. (China)
Zichen Chen, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 6040:
ICMIT 2005: Mechatronics, MEMS, and Smart Materials
Yunlong Wei; Kil To Chong; Takayuki Takahashi; Shengping Liu; Zushu Li; Zhongwei Jiang; Jin Young Choi, Editor(s)

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