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Proceedings Paper

Comparison of various optical characterization techniques for the surface analysis of optical-grade germanium infrared materials
Author(s): Heidi Ottevaere; Anna Szpak; Igor Romandic; Jan Van Nylen; Hans Vercammen; Dirk Vyncke; Malgorzata Kujawinska; Hugo Thienpont
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Paper Abstract

Optimization of the optical quality of optical-grade germanium components requires an in-depth investigation of the different contributions to the optical loss in germanium. In this paper we therefore focus on this optical characterization. We give an overview of possible characterization techniques to determine surface roughness, surface/bulk absorption and refractive index inhomogeneities and we highlight the obtained optical characteristics. To conclude we select the most appropriate non-destructive characterization tool for each optical parameter.

Paper Details

Date Published: 28 April 2006
PDF: 10 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61881D (28 April 2006); doi: 10.1117/12.663598
Show Author Affiliations
Heidi Ottevaere, Vrije Univ. Brussel (Belgium)
Anna Szpak, Warsaw Univ. of Technology (Poland)
Igor Romandic, Umicore Electro-Optic Materials (Belgium)
Jan Van Nylen, Umicore Electro-Optic Materials (Belgium)
Hans Vercammen, Umicore Electro-Optic Materials (Belgium)
Dirk Vyncke, Umicore Electro-Optic Materials (Belgium)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)

Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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