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Proceedings Paper

A comparison of surface metrology techniques
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Paper Abstract

The study of nanometre surface metrology is becoming more and more commonplace in industrial and research environments. Because of this expansion there are more and more technologies available for looking at the surface and due to the differences in the techniques each has its own specialist applications. Stylus profilometry, white light interferometry and confocal microscopy are common techniques used to measure surface metrology to nanometre precision. Strengths and weaknesses of each of the techniques are discussed with examples.

Paper Details

Date Published: 27 April 2006
PDF: 7 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880B (27 April 2006); doi: 10.1117/12.663390
Show Author Affiliations
Mike Conroy, Taylor Hobson Ltd. (United Kingdom)
Joe Armstrong, Taylor Hobson Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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