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Proceedings Paper

Tunable InP/air MOEMS filter with record breaking selectivity
Author(s): Michel Garrigues; Jérôme Danglot; Jean-Louis Leclercq
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Paper Abstract

We describe the design and fabrication of novel Fabry-Perot tunable filters based on a deformable structure composed of surface micromachined indium phosphide (InP) / Air Distributed Bragg Reflectors (DBRs). As compared to conventional designs, superior spectral selectivity has been achieved by displacing the resonant cavity into the high index material (InP) rather than in air. This configuration is expected to reduce significantly the lateral losses of the cavity. The filters feature also a novel doping structure for bi-directional electrostatic actuation. We present simulations and experimental results that demonstrate the effectiveness of this high index cavity concept for improving the selectivity of small dimension tunable MOEMS filters. The devices are fabricated using a multiple InP-air-gap MOEMS technology based on the sacrificial etching of an InP / InGaAs stack A spectral linewidth better than 0.15 nm over a tuning range of 40 nm is experimentally demonstrated. Design improvements for doubling the tuning range are also proposed.

Paper Details

Date Published: 21 April 2006
PDF: 10 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860I (21 April 2006); doi: 10.1117/12.662815
Show Author Affiliations
Michel Garrigues, École Centrale de Lyon, Lab. of Electronics, Optoelectronics and Microsystems, CNRS (France)
Jérôme Danglot, École Centrale de Lyon, Lab. of Electronics, Optoelectronics and Microsystems, CNRS (France)
Jean-Louis Leclercq, École Centrale de Lyon, Lab. of Electronics, Optoelectronics and Microsystems, CNRS (France)


Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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