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Proceedings Paper

Nanofabrication by direct laser writing and holography (Invited Paper)
Author(s): Kock Khuen Seet; Vygandas Jarutis; Saulius Juodkazis; Hiroaki Misawa
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Paper Abstract

The physical principles underlying a three-dimensional (3D) laser microstructuring technique are outlined, its applications for the fabrication of 3D (nano)micro-structured materials are presented. The direct laser writing and holographic recording in SU-8 photoresist are described. The limits of the lateral and axial light localization of a Gaussian pulse/beam at the focus are derived for the multi-photon absorption taking into account the threshold of photomodification. Prospective holographic patterns formed by interference of circularly and linearly polarized beams are discussed.

Paper Details

Date Published: 5 December 2005
PDF: 9 pages
Proc. SPIE 6050, Optomechatronic Micro/Nano Devices and Components, 60500S (5 December 2005); doi: 10.1117/12.660605
Show Author Affiliations
Kock Khuen Seet, Hokkaido Univ. (Japan)
Vygandas Jarutis, Hokkaido Univ. (Japan)
Saulius Juodkazis, Hokkaido Univ. (Japan)
Hiroaki Misawa, Hokkaido Univ. (Japan)

Published in SPIE Proceedings Vol. 6050:
Optomechatronic Micro/Nano Devices and Components
Yoshitada Katagiri, Editor(s)

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