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Proceedings Paper

Accurate OPC model generation through use of a streamlined data flow incorporating automated test-structure layout and CD-SEM recipe generation
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Paper Abstract

In this paper we present a method that optimizes the OPC model generation process. The elements in this optimized flow include: an automated test structure layout engine; automated SEM recipe creation and data collection; and OPC model anchoring/validation software. The flow is streamlined by standardizing and automating these steps and their inputs and outputs. A major benefit of this methodology is the ability to perform multiple OPC "screening" refinement loops in a short time before embarking on final model generation. Each step of the flow is discussed in detail, as well as our multi-pass experimental design for converging on a final OPC data set. Implementation of this streamlined process flow drastically reduces the time to complete OPC modeling, and allows generation of multiple complex OPC models in a short time, resulting in faster release and transfer of a next-generation product to manufacturing.

Paper Details

Date Published: 14 March 2006
PDF: 12 pages
Proc. SPIE 6156, Design and Process Integration for Microelectronic Manufacturing IV, 615614 (14 March 2006); doi: 10.1117/12.660600
Show Author Affiliations
Mary Coles, Texas Instruments Inc. (United States)
Lewis Flanagin, Texas Instruments Inc. (United States)
Ben Rathsack, Texas Instruments Inc. (United States)
Steve Prins, Texas Instruments Inc. (United States)
James Blatchford, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 6156:
Design and Process Integration for Microelectronic Manufacturing IV
Alfred K. K. Wong; Vivek K. Singh, Editor(s)

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