In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due to their attraction in terms of miniaturization, batch fabrication and ease of integration with the required electronics circuitry. Micro-opto-electro-mechanical (MOEM) devices and systems, based on the principles of integrated optics and micromachining technology on silicon have immense potential for sensor applications. Employing optical techniques have important advantages such as functionality, large bandwidth and higher sensitivity. Pressure sensing is currently the most lucrative market for solid-state micro sensors. Pressure sensing using micromachined structures utilize the changes induced in either the resistive or capacitive properties of the electro-mechanical structure by the impressed pressure. Integrated optical pressure sensors can utilize the changes to the amplitude, phase, refractive index profile, optical path length, or polarization of the lightwave by the external pressure. In this paper we compare the performance characteristics of three types of MOEM pressure sensors based on Mach-Zehnder Interferometer (MZI), Directional Coupler (DC) and racetrack resonator (RR) integrated optical geometries. The first two configurations measure the pressure changes through a change in optical intensity while the third one measures the same in terms of frequency or wavelength change. The analysis of each sensors has been carried out in terms of mechanical and optical models and their interrelationship through optomechanical coupling. For a typical diaphragm of size 2mm × 1mm × 20 μm, normalized pressure sensitivity of 18.35 μW/mW/kPa, 29.37 μW/mW/kPa and 2.26 pm/kPa in case of MZI, DC and RR devices have been obtained respectively. The noise performance of these devices are also presented.

Date Published: 31 March 2006
PDF: 11 pages
Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61721A (31 March 2006);

Published in SPIE Proceedings Vol. 6172:
Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)