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Proceedings Paper

Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses
Author(s): Takeshi Higashiguchi; Naoto Dojyo; Masaya Hamada; Keita Kawasaki; Wataru Sasaki; Shoichi Kubodera
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Paper Abstract

We demonstrated a debris-free, efficient laser-produced plasma extreme ultraviolet (EUV) source by use of a regenerative liquid microjet target containing tin-dioxide (SnO2) nano-particles. By using a low SnO2 concentration (6%) solution and dual laser pulses for the plasma control, we observed the EUV conversion efficiency of 1.2% with undetectable debris.

Paper Details

Date Published: 24 March 2006
PDF: 8 pages
Proc. SPIE 6151, Emerging Lithographic Technologies X, 615145 (24 March 2006); doi: 10.1117/12.659162
Show Author Affiliations
Takeshi Higashiguchi, Univ. of Miyazaki (Japan)
Naoto Dojyo, Univ. of Miyazaki (Japan)
Masaya Hamada, Univ. of Miyazaki (Japan)
Keita Kawasaki, Univ. of Miyazaki (Japan)
Wataru Sasaki, NTP Inc. (Japan)
Shoichi Kubodera, Univ. of Miyazaki (Japan)

Published in SPIE Proceedings Vol. 6151:
Emerging Lithographic Technologies X
Michael J. Lercel, Editor(s)

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