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Proceedings Paper

Experimental validation and testing of components for active damping control for micromachined mechanical vibration isolation filters using electrostatic actuation
Author(s): Robert Dean; George Flowers; Nicole Sanders; Roland Horvath; Wayne Johnson; Michael Kranz; Michael Whitley
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Paper Abstract

Missiles, rockets and certain types of industrial machinery are exposed extreme vibration environments, with high frequency/amplitude mechanical vibrations which may be detrimental to components that are sensitive to these high frequency mechanical vibrations, such as MEMS gyroscopes and resonators, oscillators and some micro optics. Exposure to high frequency mechanical vibrations can lead to a variety of problems, from reduced sensitivity and an increased noise floor to the outright mechanical failure of the device. One approach to mitigate such effects is to package the sensitive device on a micromachined vibration isolator tuned to the frequency range of concern. In this regard, passive micromachined silicon lowpass filter structures (spring-mass-damper) have been developed and demonstrated. However, low damping (especially if operated in near-vacuum environments) and a lack of tunability after fabrication has limited the effectiveness and general applicability of such systems. Through the integration of a electrostatic actuator, a relative velocity sensor and the passive filter structure, an active micromachined mechanical lowpass vibration isolation filter can be realized where the damping and resonant frequency can be tuned. This paper presents the development and validation of a key component of the micromachined active filter, a sensor for measuring the relative velocity between micromachined structures.

Paper Details

Date Published: 31 March 2006
PDF: 11 pages
Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61721C (31 March 2006);
Show Author Affiliations
Robert Dean, Auburn Univ. (United States)
George Flowers, Auburn Univ. (United States)
Nicole Sanders, Auburn Univ. (United States)
Roland Horvath, Auburn Univ. (United States)
Wayne Johnson, Auburn Univ. (United States)
Michael Kranz, Morgan Research Corp. (United States)
Michael Whitley, Morgan Research Corp. (United States)

Published in SPIE Proceedings Vol. 6172:
Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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