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Proceedings Paper

Feedforward hysteresis compensation in trajectory control of piezoelectrically-driven nanostagers
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Paper Abstract

Complex structural nonlinearities of piezoelectric materials drastically degrade their performance in variety of micro- and nano-positioning applications. From the precision positioning and control perspective, the multi-path time-history dependent hysteresis phenomenon is the most concerned nonlinearity in piezoelectric actuators to be analyzed. To realize the underlying physics of this phenomenon and to develop an efficient compensation strategy, the intelligent properties of hysteresis with the effects of non-local memories are discussed. Through performing a set of experiments on a piezoelectrically-driven nanostager with high resolution capacitive position sensor, it is shown that for the precise prediction of hysteresis path, certain memory units are required to store the previous hysteresis trajectory data. Based on the experimental observations, a constitutive memory-based mathematical modeling framework is developed and trained for the precise prediction of hysteresis path for arbitrarily assigned input profiles. Using the inverse hysteresis model, a feedforward control strategy is then developed and implemented on the nanostager to compensate for the system everpresent nonlinearity. Experimental results demonstrate that the controller remarkably eliminates the nonlinear effect if memory units are sufficiently chosen for the inverse model.

Paper Details

Date Published: 5 April 2006
PDF: 9 pages
Proc. SPIE 6173, Smart Structures and Materials 2006: Smart Structures and Integrated Systems, 61730O (5 April 2006); doi: 10.1117/12.658079
Show Author Affiliations
Saeid Bashash, Clemson Univ. (United States)
Nader Jalili, Clemson Univ. (United States)

Published in SPIE Proceedings Vol. 6173:
Smart Structures and Materials 2006: Smart Structures and Integrated Systems
Yuji Matsuzaki, Editor(s)

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