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Proceedings Paper

Nano-interconnection for microelectronics and polymers with benzo-triazole
Author(s): Yeonjoon Park; Sang H. Choi; Hyunpil Noh; Young Kuk
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Paper Abstract

Benzo-Triazole (BTA) is considered as an important bridging material that can connect an organic polymer to the metal electrode on silicon wafers as a part of the microelectronics fabrication technology. We report a detailed process of surface induced 3-D polymerization of BTA on the Cu electrode material which was measured with the Ultraviolet Photoemission Spectroscopy (UPS), X-ray Photoemission Spectroscopy (XPS), and Scanning Tunneling Microscope (STM). The electric utilization of shield and chain polymerization of BTA on Cu surface is contemplated in this study.

Paper Details

Date Published: 31 March 2006
PDF: 7 pages
Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 617214 (31 March 2006); doi: 10.1117/12.657760
Show Author Affiliations
Yeonjoon Park, Science and Technology Corp. (United States)
Sang H. Choi, NASA Langley Research Ctr. (United States)
Hyunpil Noh, Samsung Electronics Co. Ltd. (South Korea)
Young Kuk, Seoul National Univ. (South Korea)

Published in SPIE Proceedings Vol. 6172:
Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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